Vacuum chamber 340 x 400 x 450mm
Door with auto unlock feature after end of process
Microwave excitation 2.45GHz magnetron, maximum adjusted power 1200W
3 gas channels with Brooks MFC: N2, Ar, O2
Pfeiffer DUO65C vacuum pump with Fomblin oil (PFPE)
Pressure gauge: Baratron absolute transducer
PLC process controller with RS232
Power req: 230/400VAC, 3 phase, grounded, 50/60hz
Vacuum chamber 340 x 400 x 450mm
Door with auto unlock feature after end of process
Microwave excitation 2.45GHz magnetron, maximum adjusted power 1200W
3 gas channels with Brooks MFC: N2, Ar, O2
Pfeiffer DUO65C vacuum pump with Fomblin oil (PFPE)
Pressure gauge: Baratron absolute transducer
PLC process controller with RS232
Power req: 230/400VAC, 3 phase, grounded, 50/60hz