Ulvac SV-6040-C16

Batch Type Vacuum Sputtering System. Currently configured for RF Sputtering. Includes a second system for spares or future rebuild. Customer set this one up for production but never used the second system. Both purchased used. See photos of second machine. Vertical batch type magnetron sputter system for large volume substrate processing. Four ENI GHW-50 5000W 13.56 MHz RF generators. CTI 400 cryo pump with 9600 compressor and Ulvac pump and blower package. Four sputtering cathodes 5 in. x 17-3/4 in. Second system may be missing a couple parts. See photos. Untested Sold As Is.
InvNumber: 61296